EMS 150T ES – A high resolution sputter coater and high vacuum carbon evaporator
Metal sputtering or carbon evaporation
Fine grain sputtering – for advanced high resolution FESEM applications.
High vacuum turbo pumping – allows sputtering of a wide range of oxidizing and
non-oxidizing metals – suitable for SEM, high resolution FESEM and also for many
thin film applications
High vacuum carbon coating – ideal for SEM and TEM carbon coating applications
Fully automatic touch screen control – rapid data input, simple operation
Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
Note: The EMS 150T ES sputter coater has a Platinum Target for fine grain sputtering.
Optional targets for future acquisition are: Gold, Iridium and Chromium.
Optional future acquisition: film thickness monitor for precise thickness control.
