Scanning Electron Microscope
SEM is an advanced imaging instrument that employs electron beams to visualize the surface morphology
of specimens with high resolution. By scanning the specimen, SEM generates detailed images, revealing
micro- and nano-scale structural features crucial for scientific analysis in fields such as materials
science and biology. SEM can be high-resolution imaging, elemental composition, surface analysis,
material characterization, and 3D Imaging.
General Methods Description:
Samples were mounted on conductive aluminum stubs and coated with 15 nm of platinum to reduce charging. Imaging was performed using a JEOL JSM-6500F field-emission SEM at 5 kV accelerating voltage and an 18 mm working distance. Secondary electron and backscattered electron signals were collected to examine surface morphology and composition. Elemental analysis was conducted using an Oxford X-Max 50 EDS detector, with spectra and maps acquired under optimized beam conditions (20 kV, 12–15 mm WD). SEM and EDS data were processed using the manufacturer's software with standard background subtraction and peak identification.
General Methods Description:
Samples were mounted on conductive aluminum stubs and coated with 15 nm of platinum to reduce charging. Imaging was performed using a JEOL JSM-6500F field-emission SEM at 5 kV accelerating voltage and an 18 mm working distance. Secondary electron and backscattered electron signals were collected to examine surface morphology and composition. Elemental analysis was conducted using an Oxford X-Max 50 EDS detector, with spectra and maps acquired under optimized beam conditions (20 kV, 12–15 mm WD). SEM and EDS data were processed using the manufacturer's software with standard background subtraction and peak identification.
Apreo 2 SEM
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Specifications:
Resources:
Specifications:
| Resolution |
- 0.9 nm at 1 kV - 0.8 nm at 1 kV (beam decel.) - 1.0 nm at 1 kV, 10 mm working distance (beam decel.) - 0.8 nm at 500 V (beam decel.) - 1.2 nm at 200 V (beam decel.) |
| Standard Detectors | ETD, T1, T2, T3, IR-CCD, Nav-Cam+ |
| PivotBeam | Mode for selected area electron channeling (also known as "rocking beam" mode) |
| Optional Detectors | DBS, LVD, STEM 3+, EDS, EBSD |
| ChemiSEM Technology | Live quantitative SEM image coloring is available based on energy dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps, and reliable Noran quantification are included. |
| Landing Energy Range | 20 eV – 30 keV |
| Stage Bias (Beam Deceleration) | -4000 V to +600 V standard with every system |
| Low Vacuum Mode | Optional: 10 – 500 Pa chamber pressure |
| Stage | 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position. |
| Maximum Beam Current | 50 nA |
| Standard Sample Holder | Multi-purpose holder, uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples and two pre-tilted row-bar holders (38° and 90°) and does not require tools to mount a sample |
Zeiss SUPRA 40
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Specifications:
Resources:
Specifications:
| Nominal Resolution | 1.5 nm (at accelerating voltage 10kV) |
| Accelerating Voltage | Max. 30kV |
| Magnification Range | 10X to 500,000X |
| Attachments | EDAX EBSD with OIM software |
Hitachi TM-1000 Table Top SEM
Specifications:
Specifications:
| Depth of Focus | 0.5mm |
| Resolution | 30nm |
| Magnification Range | 20-10,000X |
| Sample Size | Up to 70mm |
