| Resolution on Secondary Electron Image | - 1.5 nm (at accelerating voltage 15kV) - 5.0 nm (at accelerating voltage 1kV) |
| Accelerating Voltage | 0.5 to 30 kV |
| Magnification Range | 10X to 500,000X |
| Attachments | X-EDS spectrometer and Oxford Instruments INCAEnergy+ software
|
| Nominal Resolution | 1.5 nm (at accelerating voltage 10kV) |
| Accelerating Voltage | Max. 30kV |
| Magnification Range | 10X to 500,000X |
| Attachments | EDAX EBSD with OIM software |
| Depth of Focus | 0.5mm |
| Resolution | 30nm |
| Magnification Range | 20-10,000X |
| Sample Size | Up to 70mm |